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Securing clean room space while storing Instead of the shelf in the stocker
Stocker Size : 1800 X 1800mm
Capacity : ≥ 1,000
Indicate whether or not the reticle is loaded by slot
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Prevent Operator Loss Time with Reticle History Management and Reticle Search
Daily In,out Tracking Function
Reticle Fast Finding Function
Empty Slot Display Function
- On-line management through MES linkage
- Reticle history backup and restore function
- Particle, NH3, Acid (Sox, Nox) components can be removed by installing Chemical Filter
- Reticle Drop Prevention with Reticle Safety Interlock.
Capacity : > 1000EA