Reticle Cleaner + Reticle Exchanger
| Content | Specification |
|---|---|
| No. of Reticle Reticle Loading Port | 2Port (Nikon Case, ASML Reticle Pod) |
| Reticle Loading | Full-Automatic |
| Reticle Cleaning Stage | X,Y Stage Scanning |
| Dimension(mm) (Length * Width * Height) | 1200 * 1800 * 2015 |
| Reticle Handling Safety | Reticle Align System & Vacuum detection sensor |
| Barcode System | Nikon Case Barcode Reading |
| FFU System | FFU |