Reticle Stocker IRS-1000(Nikon Case)
| Content | Specification |
|---|---|
| Storge Reticle Type | 6inch Reticle with Nikon Case |
| Reticle Loading | Semi-Automatic |
| Storage Capacity | >1,000 |
| Host Interface | SECSⅡ-GEM or HSMS & Network Communication |
| Dimension(mm) (Length * Width * Height) | 1800 * 1800 * 2300 |
| Reticle Handling Safety | Nikon Case protrusion detection sensor |
| Barcode System | Nikon Case Barcode Reading |
| FFU System | FFU & Chemical Filter |