Reticle Exchanger
| Content | Specification |
|---|---|
| No. of Reticle Reticle Loading Port | 3Port (Nikon Case, ASML Reticle Pod, Nikon Reticle Pod) |
| Reticle Loading | Full-Automatic |
| Host Interface | SECSⅡ-GEM or HSMS & Network Communication |
| Dimension(mm) (Length * Width * Height) | 1140 * 1200 * 1860 |
| Reticle Handling Safety | Reticle moving overload detecting sensor |
| Barcode System | Nikon Case Barcode Reading |
| FFU System | FFU |